Input Type	Precision	units	Stage A	Stage B	Stage C	Stage R
Linear Stage	Encoder Accuracy	micron
Linear Stage	Straightness	micron
Linear Stage	Flatness	micron
Linear Stage	Pitch	arc sec
Linear Stage	Yaw	arc sec
Linear Stage	Roll	arc sec
Rotary Stage	Encoder Accuracy	arc sec
Rotary Stage	Wobble	arc sec
Rotary Stage	Radial Runout	micron
Stage Assembly	axis 1 coincides with	X,Y or Z
Stage Assembly	axis 2 coincides with	X,Y or Z
Stage Assembly	axis 3 coincides with	X,Y or Z
Abbe Offset	in local direction 1	mm
Abbe Offset	in local direction 2	mm
Abbe Offset	in local direction 3	mm

Results Type	Global Direction	units	Stage A	Stage B	Stage C	Stage R	Total
Precision in	global X direction	micron
Precision in	global Y direction	micron
Precision in	global Z direction	micron
Precision in	3 D Total	micron

3 Dimensional Precision Analysis XYZR Copyright 2005 Optinet Inc. RETURN Date Project Customer Analyst Comments